I'm having the same problem with my Z87-PLUS and Win 8.1 RTM 64bit (I'm an MSDN Subscriber), and AISuite_III_Win7_8_Z87-PLUS_VER10055.zip
I was previously running the 'Preview' of Win8.1 and AISuite_III_Win7_8_Z87-PLUS_VER10051.zip, and it was working fine.
Then I did a secure-erase, formatted the drive with 8.1 RTM, and installed AVAST A/V, and tried to install AISuite_III_Win7_8_Z87-PLUS_VER10055.zip
The install failed; AVAST blocked something, so I disabled AVAST and ran the installer again, but now I get the CreateProcess Failed (2) messages.
I've tried uninstalling and running the cleaner, but I still get the same problem after re-installing 10051 or 10055.
I don't think the cleaner is working right.
I hope I can get this fixed, as I was able to overclock my i5-4670k to 4.5GHz stable with AiSuite previously.